Micromirrors and hinge structures for micromirror arrays in...

Details Micromirrors and hinge structures for micromirror arrays in... Micromirrors and hinge structures for micromirror arrays in...

2006-03-28

2006-03-28

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S291000, C359S292000

Reexamination Certificate

active

07019880

ABSTRACT:
The micromirror of the present invention comprises a mirror plate having thereon a cavity allowing deformation of a hinge attached to the mirror plate and deflection of the mirror plate in operation.

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