Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Reexamination Certificate
2006-09-12
2006-09-12
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Distortion introducing or rectifying
C355S047000, C355S053000
Reexamination Certificate
active
07106415
ABSTRACT:
A zero power identical pair of oppositely-oriented meniscus lens elements mounted in the projection light path, serves as curved mask support while compensating for optical anomalies such as beam shift and beam deviations produced by other transparent supports for the curved mask. The zero-power meniscus lens pair, without affecting the transmission beam characteristics, lets the beam diffract as efficiently as does a regular planar mask, thus preserving the partial coherence effects and resolution concepts of projection lithography. This simple but novel optics device is not only expected to clear several barriers for curved mask projection lithography but also find place in other applications where collimated or converging light beams have to travel extra paths without significant aberration.
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Jain Kanti
Klosner Marc A.
Kuchibhotla Sivarama K.
Anvik Corporation
Kling Carl C.
Nguyen Henry Hung
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