Method of defect inspection of graytone mask and apparatus...

Details Method of defect inspection of graytone mask and apparatus... Method of defect inspection of graytone mask and apparatus...

2006-04-25

2006-04-25

Mehta, Bhavesh M. (Department: 2625)

Image analysis

Applications

Manufacturing or product inspection

C382S147000, C382S149000, C356S237500

Reexamination Certificate

active

07035448

ABSTRACT:
A comparative inspection technique is employed for detecting defects by comparing similar patterns formed in a mask. As thresholds of information appearing according to the pattern difference, a special graytone-defect extracting threshold in addition to thresholds for extracting ordinary defects in a opaque and a transmission part is newly provided. Further, by distinguishing a case of inspecting an area wherein the opaque and transmission parts are formed from a case of inspecting an area wherein a graytone part is formed, so that inspection is made by using the thresholds for extracting ordinary defects in the opaque and transmission parts in the case of inspecting the opaque and the transmission parts and that inspection is made by using the special graytone-defect extracting threshold in the case of inspecting the graytone part.

REFERENCES:
patent: 6436802 (2002-08-01), Khoury
patent: 6529621 (2003-03-01), Glasser et al.
patent: 6714670 (2004-03-01), Goldsworthy et al.

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