Processing apparatus for processing object in vessel

Details Processing apparatus for processing object in vessel Processing apparatus for processing object in vessel

2006-01-03

2006-01-03

Nguyen, Judy (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

06982782

ABSTRACT:
An apparatus for processing an object includes a vessel which forms a pressure-reduced inner space and accommodates the object, a member which is supported by an inner side of the vessel through a heat insulator, and a temperature adjusting portion which adjusts a temperature of the member.

REFERENCES:
patent: 6630984 (2003-10-01), Bisschops
patent: 6700641 (2004-03-01), Shiraishi
patent: 2001/0050759 (2001-12-01), Kamiya
patent: 2002/0027644 (2002-03-01), Bisschops
patent: 2003/0192686 (2003-10-01), Hisai et al.
patent: 2004/0248315 (2004-12-01), Klein et al.
patent: 10-154655 (1998-06-01), None
patent: 3567146 (2004-09-01), None

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