Method and apparatus for locating objects using universal...

Image analysis – Applications – Target tracking or detecting

Reexamination Certificate

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Reexamination Certificate

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07043055

ABSTRACT:
A method and apparatus for locating objects by means of machine vision alignment using cooperative targets. Novel cooperative targets are used that have substantial performance advantages. Alignment methods having non-translation alignment capabilities are used, such as geometric pattern matching, cooperating with suitable targets to perform alignment in non-translation degrees of freedom, such as orientation and size.

REFERENCES:
patent: 5125035 (1992-06-01), McCarthy et al.
patent: 5341435 (1994-08-01), Corbett et al.
patent: 5835641 (1998-11-01), Sotoda et al.
patent: 5845008 (1998-12-01), Katoh et al.
patent: 5960125 (1999-09-01), Michael et al.
patent: 5974365 (1999-10-01), Mitchell
patent: 5978511 (1999-11-01), Horiuchi et al.
patent: 6137893 (2000-10-01), Michael et al.
patent: 6595744 (2003-07-01), Van Houten
patent: 0487563 (1992-09-01), None
patent: 405272946 (1993-10-01), None
patent: 05-025989 (1994-05-01), None
patent: WO 96/33345 (1996-10-01), None
patent: PCT/US 97/18268 (1998-04-01), None
KLA-Tencor, Inc., Candidate Alignment Target For Wafer, 1997.
David I. Haverlock, Geometric Precision in Noise-Free Digital Images, IEEE Transactions on Pattern Analysis and Machine Intelligence, vol. II No 10. Oct. 1989.
John W. Hill, Machine Intelligence Research Applied To Industrial Automation, National Technical Information Service, U.S. Department of Commerce, Nov. 1980.
Chinmoy B. Bose and Isreal Amir, Design of Fiducials for accrate Registration Using Machine Visions, IEEE Transaction on Pattern Analysis and Machine Intelligence, vol. 12 No. 12, Dec. 1990.
Lawrence O'Gorman, Subpixel Precision of Straight-Edged Shapes for Registration and Measurement, IEEE Transactions on Pattern Analysis and Machine Intelligence, vol. 18, No. 7 1996.
H.F. Gillespie and J.E. Martin, Optimization of Optical Alignment Marks Through Circuit Design Rule Consideration, Rockwell International, Newport Beach, CA, 1978.
Neal T. Sullivan, Semiconductor Pattern Overlay, Digital Equipment Corp., Advanced Semiconductor Development.
Hideki Ina, Koichi Sentoku and Takahiro Matsumoto (Nanotechnology research Center)—Hiroaki Sumitani and Muneyoshi Suita (Advanced Technology R&D Center, Alignment Mark Optimization to Reduce Tool and Wafer Induced Shift for XRA-1000.
W. Makous, Optimal Patterns For Alignment, Applied Optics vol. 13, No. 3, Mar. 1974.
Egil D. Castel and Nader Shamma, Design and Optimization of Site-By-Site Alignment Marks for a Single Polysilicon Bipolar Process, National Semiconductor Corporation, Elsevier Science Publishers B.V.
Alfred M. Bruckstein, Larry O'Gorman and Alon Orlitsky, Design of Shapes for Precise Image Registration, IEEE Transactions on Information Theory, vol. 44, No. 7, Nov. 1998.

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