Method of inspecting a semiconductor dynamic quantity sensor

Details Method of inspecting a semiconductor dynamic quantity sensor Method of inspecting a semiconductor dynamic quantity sensor

2006-05-16

2006-05-16

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S763010

Reexamination Certificate

active

07046028

ABSTRACT:
A method of inspecting a semiconductor dynamic quantity includes varying a potential applied to a peripheral fixed portion while applying predetermined potentials to fixed electrodes and to movable electrodes to vary the potential difference between the movable electrodes and the support substrate and to displace the movable electrodes in a direction perpendicular to the surface of the substrate.

REFERENCES:
patent: 6151966 (2000-11-01), Sakai et al.
patent: 6841840 (2005-01-01), Sakai
patent: 2005/0062067 (2005-03-01), Kunda et al.
patent: 2005/0205949 (2005-09-01), Tokunaga

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