Thin film forming device, method of forming a thin film, and...

Details Thin film forming device, method of forming a thin film, and... Thin film forming device, method of forming a thin film, and...

2006-04-04

2006-04-04

Sarkar, Asok Kumar (Department: 2891)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S022000

Reexamination Certificate

active

07022535

ABSTRACT:
Measure of forming an EL layer by selectively depositing through evaporation a material for forming the EL layer at a desired location is provided. When a material for forming an EL layer is deposited, a mask (113) is provided between a sample boat (111) and a substrate (110). By applying voltage to the mask (113), the direction of progress of the material for forming the EL layer is controlled to be selectively deposited at a desired location.

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