Optical: systems and elements – Optical modulator – Having particular chemical composition or structure
Reexamination Certificate
2006-07-11
2006-07-11
Spector, David N. (Department: 2873)
Optical: systems and elements
Optical modulator
Having particular chemical composition or structure
C257S758000, C349S158000, C438S018000, C359S245000
Reexamination Certificate
active
07075704
ABSTRACT:
A plurality of film formation layers on which respective film formation patterns are formed; interlayer films formed among the plurality of film formation layers; test element patterns formed in test element formation regions with the same material as that of each film formation pattern of at least one film formation layer among the plurality of film formation layers; openings formed in the test element formation regions of an interlayer film of a planarized uppermost layer, thereby exposing a pair of pads connected to the test element patterns; and dummy patterns formed below the corresponding one of the pair of pads with the same material as that of each of the film formation patterns of predetermined film formation layers among the plurality of film formation layers, thereby defining the vertical locations of the pads and the contact holes, etc. in the test element formation regions.
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Oliff & Berridg,e PLC
Seiko Epson Corporation
Spector David N.
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