Micro-mirrors with flexure springs

Details Micro-mirrors with flexure springs Micro-mirrors with flexure springs

2006-05-16

2006-05-16

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224200, C359S865000, C359S872000

Reexamination Certificate

active

07046415

ABSTRACT:
A micro-mirror device includes a micro-mirror and a flexure spring supporting the micro-mirror. The flexure spring is configured to store potential energy during movement of the micro-mirror that is released as kinetic energy to drive movement of the micro-mirror when the micro-mirror is re-oriented.

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