Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2006-03-14
2006-03-14
Zimmer, Marc S (Department: 1712)
Stock material or miscellaneous articles
Composite
Of silicon containing
C428S448000, C528S031000, C528S032000, C528S043000
Reexamination Certificate
active
07011889
ABSTRACT:
The present invention provides an organosiloxane comprising at least 80 weight percent of Formula I: [Y0.01-1.0SiO1.5-2]a[Z0.01-1.0SiO1.5-2]b[H0.01-1.0SiO1.5-2]cwhere Y is aryl; Z is alkenyl; a is from 15 percent to 70 percent of Formula I; b is from 2 percent to 50 percent of Formula I; and c is from 20 percent to 80 percent of Formula I. The present composition is useful in semiconductor devices and may be advantageously used as an etch stop.
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patent: 5494750 (1996-02-01), Fujioka et al.
patent: 5859162 (1999-01-01), Yamamoto et al.
patent: 6143855 (2000-11-01), Hacker et al.
Bedwell William B.
Hacker Nigel P.
Iwamoto Nancy
Leung Roger Y.
Moro Lorenza
Bingham McCutchen
Honeywell International , Inc.
Thompson Sandra P.
Zimmer Marc S
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