Maskless optical writer

Details Maskless optical writer Maskless optical writer

2006-03-14

2006-03-14

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C430S005000

Reexamination Certificate

active

07012674

ABSTRACT:
A maskless pattern generating system for use in lithography includes a light source that generates a light beam, a programmable pattern generator that generates a pattern image from the light beam based on a control signal input, and a controller to provide the control signal input to the programmable pattern generator based on pattern information provided to the controller. The control signal input instructs the programmable pattern generator to set individual voltage levels corresponding to individual pixels in a pixel array, wherein each of the individual voltage levels corresponds to a greyscale level assigned to a particular individual pixel. Setting the individual voltage levels provide a phase shift of the resulting pattern image beam, allowing the programmable pattern generator to act as a phase shift mask. This maskless pattern writing system acts as a light valve to control pattern imagery, on a pixel by pixel basis, for the purposes of direct writing patterns.

REFERENCES:
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5721622 (1998-02-01), Venkateswar
patent: 5742362 (1998-04-01), Chikamichi
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 5998069 (1999-12-01), Cutter et al.
patent: 6084656 (2000-07-01), Choi et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6291110 (2001-09-01), Cooper et al.
patent: 6333780 (2001-12-01), Tsukuda
patent: 6356340 (2002-03-01), Spence
patent: 6407766 (2002-06-01), Ramanujan et al.
patent: 6480261 (2002-11-01), Cooper et al.
patent: 6580490 (2003-06-01), Wong et al.
patent: 6687041 (2004-02-01), Sandstrom
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0130561 (2004-07-01), Jain
patent: 2004/0145712 (2004-07-01), Bleeker
patent: 2005/0007572 (2005-01-01), George et al.
patent: 2005/0012916 (2005-01-01), Van Der Mast et al.
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
Janssen, P., et al., “Design aspects of a scrolling color LCoS display,” Displays, vol. 23, Issue 3, pp. 99-108, Elsevier Science B.V., Jun. 2002.
“Large-Screen, High-Resolution Projection Displays,” Philips Research Password, Issue 4, pp. 16-19, Jul. 2000.
Search Report for Singapore Patent Application No. 200500026-0, mailed by the Australian Patent Office on Aug. 17, 2005, 3 pages.

Affiliated with

Also associated with

Rating

Maskless optical writer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Maskless optical writer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Maskless optical writer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3561879