Method for preparing a ring-formed body, and magnetic memory...

Details Method for preparing a ring-formed body, and magnetic memory... Method for preparing a ring-formed body, and magnetic memory...

2006-09-19

2006-09-19

Le, Thao P. (Department: 2818)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C365S171000

Reexamination Certificate

active

07109045

ABSTRACT:
A method of preparing a ring-formed body comprises the steps of: forming, on a substrate, a column in a columnar form which serves as a core of a ring-formed body; depositing, on both the substrate and the column, a ring-formed body forming film for forming the ring-formed body so that the ring-formed body forming film formed on the substrate and that formed on the column are separated from each other; forming a mask film for covering the ring-formed body forming film; and subjecting the mask film and ring-formed body forming film to anisotropic dry etching so that the films remain on a sidewall of the column, forming a ring-formed body comprised of the ring-formed body forming film having the mask film.

REFERENCES:
patent: 5963467 (1999-10-01), Miyatake et al.
patent: 6178108 (2001-01-01), Miyatake et al.
patent: 6870718 (2005-03-01), Takahashi et al.
patent: 6947316 (2005-09-01), Takahashi et al.

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