Methods and systems for measuring internal dimensions of...

Details Methods and systems for measuring internal dimensions of... Methods and systems for measuring internal dimensions of...

2006-05-02

2006-05-02

Nguyen, Vincent Q. (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S691000

Reexamination Certificate

active

07038472

ABSTRACT:
The present invention provides novel devices for measuring internal dimensions of microscale structures. Methods in accordance with the invention use the voltage measured at a midpoint between a reference structure and a sample structure to determine the resistance of the sample structure, and to then calculate an internal dimension of the sample structure.

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