Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate
2006-01-03
2006-01-03
Evans, Geoffrey S. (Department: 1725)
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
C219S121680
Reexamination Certificate
active
06982429
ABSTRACT:
Sample preparation apparatus and method includes a wafer stage platform with an optical microscope and integrated pattern recognition to automatically address specific locations on the wafer sample of interest. A laser attaches to the optical microscope to mill a set pattern around the area of interest. A precision micro-manipulator engages the sample support structure, extracts the structure, and places the structure in a TEM holder or holder tip. The holder or holder tip can then be placed inside a FIB for final thinning, followed by direct transfer into the TEM.
REFERENCES:
patent: 5059764 (1991-10-01), Baer
patent: 5208437 (1993-05-01), Miyauchi et al.
patent: 5350921 (1994-09-01), Aoyama et al.
patent: 5656186 (1997-08-01), Mourou et al.
patent: 5922224 (1999-07-01), Broekroelofs
patent: 6140603 (2000-10-01), Hwang et al.
patent: 6300631 (2001-10-01), Shofner
patent: 6489589 (2002-12-01), Alexander
patent: 6841788 (2005-01-01), Robinson et al.
patent: 2004/0016888 (2004-01-01), Haraguchi
patent: 9-96595 (1997-04-01), None
patent: 11-145087 (1999-05-01), None
patent: 11-160210 (1999-06-01), None
patent: 2000-329663 (2000-11-01), None
Church Kenneth H.
Robinson Joseph
Evans Geoffrey S.
Kolisch & Hartwell, P.C.
LandOfFree
Transmission electron microscope sample preparation does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Transmission electron microscope sample preparation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Transmission electron microscope sample preparation will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3556176