Thickness estimation using conductively related calibration...

Details Thickness estimation using conductively related calibration... Thickness estimation using conductively related calibration...

2006-03-28

2006-03-28

Patidar, Jay (Department: 2862)

Electricity: measuring and testing

Magnetic

With means to create magnetic field to test material

C324S229000, C324S225000, C702S104000

Reexamination Certificate

active

07019519

ABSTRACT:
A method for monitoring an inspection sample includes generating inspection data comprising resistance and reactance measurements that are obtained from an inspection sample having a conductive layer of unknown thickness. Calibration data is used for estimating the thickness of the conductive layer of the inspection sample. This calibration data includes resistance and reactance measurements obtained from one or more calibration samples, each calibration sample having a conductive layer of known thickness. The conductive layers of the inspection sample and the calibration samples comprise different materials having a known conductive relationship.

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