Metal fusion bonding – With means to handle work or product – Work portion comprises electrical component
Reexamination Certificate
2006-05-09
2006-05-09
Johnson, Jonathan (Department: 1725)
Metal fusion bonding
With means to handle work or product
Work portion comprises electrical component
C228S044700, C269S021000
Reexamination Certificate
active
07040525
ABSTRACT:
Stage structure in a bonding machine including a plate movably fitted in a bonding chamber, a plurality of blocks of electro-static chucks fitted to the plate for providing an electro-static force to hold a substrate, a plurality of vacuum holes in the plate around the electro-static chucks for receiving a vacuum force, and adsorbing and holding the substrate, and a plurality of alignment mark confirming holes in a periphery of the plate for confirming the marks for aligning the adsorbed substrate, thereby separating substrate from the stage more easily by applying a DC power with polarities opposite to a regular DC power.
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Lee Sang Seok
Park Sang Ho
Johnson Jonathan
LG.Philips LCD Co. , Ltd.
McKenna Long & Aldridge LLP
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