Double substrate reflective spatial light modulator with...

Details Double substrate reflective spatial light modulator with... Double substrate reflective spatial light modulator with...

2006-04-04

2006-04-04

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S223100, C359S224200

Reexamination Certificate

active

07023607

ABSTRACT:
A spatial light modulator including first and second substrate, and an array of deflectable elements disposed within a gap between the first and second substrates is disclosed herein. For electrostatically actuating the deflectable elements, an array of electrodes and circuitry is provided and positioned proximate to the deflectable elements.

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