Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate
2006-04-11
2006-04-11
Le, Que T. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
C250S23700G
Reexamination Certificate
active
07026602
ABSTRACT:
The present invention provides for an improved electromagnetic radiation detector having a micromachined electrostatic chopper/shutter device. The MEMS flexible film chopper/shutter device provides reliability, efficiency, noise reduction and temperature fluctuation compensation capabilities to the associated electromagnetic radiation detector. An electromagnetic radiation detector having an electrostatic chopper/shutter device includes a detector material element and flexible film actuator overlying the detector material layer and moveable relative thereto. The flexible film actuator will typically include an electrode element and a biasing element such that the actuator remains in a fully curled, open state absent electrostatic voltage and moves to a fully uncurled, closed state upon the application of electrostatic voltage. Arrays that incorporate a plurality of electromagnetic radiation detectors and/or electrostatic shuttering devices are additionally provided for.
REFERENCES:
patent: 3471641 (1969-10-01), Baker et al.
patent: 3772537 (1973-11-01), Clifford et al.
patent: 3897997 (1975-08-01), Kalt
patent: 3917196 (1975-11-01), Pond et al.
patent: 3989357 (1976-11-01), Kalt
patent: 4025193 (1977-05-01), Pond et al.
patent: 4073567 (1978-02-01), Lakerveld et al.
patent: 4094590 (1978-06-01), Kalt
patent: 4105294 (1978-08-01), Peck
patent: 4143946 (1979-03-01), Leo et al.
patent: 4230393 (1980-10-01), Burke, Jr.
patent: 4235522 (1980-11-01), Simpson et al.
patent: 4248501 (1981-02-01), Simpson
patent: 4266339 (1981-05-01), Kalt
patent: 4317611 (1982-03-01), Petersen
patent: 4336536 (1982-06-01), Kalt et al.
patent: 4361911 (1982-11-01), Buser et al.
patent: 4468663 (1984-08-01), Kalt
patent: 4517569 (1985-05-01), Gerharz
patent: 4564836 (1986-01-01), Vuilleumier et al.
patent: 4618223 (1986-10-01), Fried
patent: 4662746 (1987-05-01), Hornbeck
patent: 4695837 (1987-09-01), Kalt
patent: 4708420 (1987-11-01), Liddiard
patent: 4710732 (1987-12-01), Hornbeck
patent: 4732440 (1988-03-01), Gadhok
patent: 4736202 (1988-04-01), Simpson et al.
patent: 4762426 (1988-08-01), Foss
patent: 4903101 (1990-02-01), Maserjian
patent: 5061049 (1991-10-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck
patent: 5097354 (1992-03-01), Goto
patent: 5172262 (1992-12-01), Hornbeck
patent: 5202785 (1993-04-01), Nelson
patent: 5212582 (1993-05-01), Nelson
patent: 5233459 (1993-08-01), Bozler et al.
patent: 5274379 (1993-12-01), Carbonneau et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5408355 (1995-04-01), Rauch et al.
patent: 5552925 (1996-09-01), Worley
patent: 5568307 (1996-10-01), Williams
patent: 5606447 (1997-02-01), Asada et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5629918 (1997-05-01), Ho et al.
patent: 5661592 (1997-08-01), Bornstein et al.
patent: 5673139 (1997-09-01), Johnson
patent: 5681103 (1997-10-01), Remillard et al.
patent: 5757562 (1998-05-01), Apollonov et al.
patent: 5867302 (1999-02-01), Fleming
patent: 5903078 (1999-05-01), Sakamoto et al.
patent: 6067183 (2000-05-01), Furlani et al.
patent: 6133570 (2000-10-01), Schimert et al.
patent: 6175443 (2001-01-01), Aksuyk et al.
patent: 6233088 (2001-05-01), Roberson et al.
patent: 6396620 (2002-05-01), Goodwin-Johansson
patent: 2002/0148964 (2002-10-01), Dausch et al.
patent: 230159 (1983-04-01), None
patent: 4235593 (1992-10-01), None
patent: 0 834 759 (1998-04-01), None
patent: WO 95/23352 (1995-08-01), None
Kurt E. Petersen, “Silicon Torsional Scanning Mirror,”IBM J. Res. Develop.Sep. 1980, pp. 631-637, vol. 25 No. 5, San Jose, California.
M. Elwenspoet et al., “Active joints for microrobot limbs,”J Micromech. microeng,1992, pp. 221-223, IOP Publishing Ltd., United Kingdom.
V.P. Jaecklin et al. “Optical Microshutters and Torsional Micromirrors For Light Modulator Arrays,”IEEE,1993, pp. 124-127.
M. Elwenspoek et al. “Static and Dynamic Properties of Active Joints,”Transducers '95-Eurosensors IX, The 8thInternational Conference on Solid-State Sensors and Actuators, and Eurosensors IX,Jun. 25-29, 1995, pp. 412-415, Stockholm, Sweden.
Rob Legtenberg et al., “Electrostatic Curved Electrode Actuators,”IIEE,1995, pp. 37-42, Catalog No. 95CH35754.
Devi S Gunawan et al., “Micromachined corner cube reflectors as a communication link,”Sensors and Actuators,1995, pp. 580-583, Nos. 1/3, Lausanne, CH.
M. Edward Montamedi et al., “Development of micro-electro-mechanical optical scanner,”Optical. Engineering,May 1997, pp. 1347-1352, vol. 36, No. 5.
J. Haji-Babaer et al. “Integrable Active Microvalve With Surface Micromachined Curled-Up Actuator,”IIEE,1997, pp. 833-836, 1997 International Conference o n Solid State Sensors and Actuators, Chicago, Jun. 16-19, 1997.
Behrang Behin, et al. “Magnetically Actuated Micromirrors for Fiber-Optic Switching,”Solid-State Sensors and Actuator WorkshopJun. 8-11, 1998, pp. 273-276, Hilton Head Island, South Carolina.
K. Deng, et al. “The Development of Polysilicon Micromotors for Optical Scanning Applications,”Paper, Electronics Design Center, Department of Electrical Engineering and Applied Physics, Case Western Reserve University, Cleveland, Ohio,5 pages.
Hiroshi Goto et al. “Scanning Optical Sensor for Micro Robot,”Paper, Central R&D Laboratory, OMRON Corporation,6 pages.
V.P. Jaecklin et al. “Mechanical and Optical Properties of Surface Micromachined Torsional Mirrors in Silicon, Polysilicon and Aluminum,”The 7thInternational Conference on Solid-State Sensors and Actuators,pp. 958-961.
Le Que T.
Research Triangle Institute
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