Ultrashort-pulse laser-working method and apparatus and...

Optical waveguides – Miscellaneous

Reexamination Certificate

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C219S121600, C219S121610, C219S121620

Reexamination Certificate

active

07072566

ABSTRACT:
A laser-working method is disclosed, which includes the steps of splitting a single pulse laser beam having a time width of not more than 500 picoseconds into plural pulse laser beams; subjecting said plural pulse laser beams to time delaying, and adjusting a working surface-irradiating shape, an intensity distribution and a working surface-irradiating position of each of the plural pulse laser beams; working a target object to be irradiated, while the respective working surface-irradiating shapes of said plural laser beams are partially or entirely spatially overlapped with each other or one another; and setting to a time interval of from a pulse width to 1 nanosecond a time period during which each of the pulse laser beams is irradiated.

REFERENCES:
patent: 6864457 (2005-03-01), Alexander et al.
patent: 7002149 (2006-02-01), Shigekawa et al.
patent: 5-57464 (1993-03-01), None
patent: 10-113782 (1998-05-01), None
patent: 11-221684 (1999-08-01), None
patent: 2002-324768 (2002-11-01), None

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