Probe sheet, probe card, semiconductor test equipment and...

Details Probe sheet, probe card, semiconductor test equipment and... Probe sheet, probe card, semiconductor test equipment and...

2006-05-23

2006-05-23

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S758010, C324S761010

Reexamination Certificate

active

07049837

ABSTRACT:
A probe card has first contact terminals electrically connected to the fine-pitch electrodes of a test target; wirings drawn from the first contact terminals; and second contact terminals electrically connected to the wirings, wherein the first contact terminals are formed each using an anisotropically etched hole in a crystalline substrate, and a semiconductor device test method (fabrication method) using the probe card.

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