Method for fabricating a fluid injection head structure

Details Method for fabricating a fluid injection head structure Method for fabricating a fluid injection head structure

2006-01-03

2006-01-03

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S025350, C029S594000, C029S830000, C029S831000, C347S045000

Reexamination Certificate

active

06981323

ABSTRACT:
The present invention provides a fluid injection head structure and a method of fabricating the same. The fluid injection head structure is disposed on a substrate and has a bubble generator, a functional device for control the bubble generator, a first conductive trace composed of poly-silicon, a chamber, a manifold in flow communication with the chamber, and a second conductive trace. The second conductive trace electrically couples the functional device with the bubble generator and the first conductive trace. Moreover, the chamber further has at least one orifice through the substrate and a gate and the first conductive trace are formed in the same photo-etching process (PEP).

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