Micro environmental sensing device

Details Micro environmental sensing device Micro environmental sensing device

2006-05-02

2006-05-02

Friedhofer, Michael (Department: 2832)

Electricity: circuit makers and breakers

Special application

Change of inclination or of rate of motion responsive

C200S06145M

Reexamination Certificate

active

07038150

ABSTRACT:
A microelectromechanical (MEM) acceleration switch is disclosed which includes a proof mass flexibly connected to a substrate, with the proof mass being moveable in a direction substantially perpendicular to the substrate in response to a sensed acceleration. An electrode on the proof mass contacts one or more electrodes located below the proof mass to provide a switch closure in response to the sensed acceleration. Electrical latching of the switch in the closed position is possible with an optional latching electrode. The MEM acceleration switch, which has applications for use as an environmental sensing device, can be fabricated using micromachining.

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