Phase gap analysis for scanning interferometry

Details Phase gap analysis for scanning interferometry Phase gap analysis for scanning interferometry

2006-01-24

2006-01-24

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S497000

Reexamination Certificate

active

06989905

ABSTRACT:
A method including: providing a coherence profile and a phase profile derived from interferometry data for a test surface; calculating a phase gap map, wherein the phase gap map is related to a difference between the coherence profile and the phase profile; fitting an expression including a term based on the coherence profile to the phase gap map; and determining a height profile for the test surface using information derived from the fit.

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patent: 2002/0135775 (2002-09-01), De Groot et al.
Thomas Dresel et al., “Three-dimensional sensing of rough surfaces by coherence radar”,Applied Optics, vol. 31, No. 7, pp. 919-925 (Mar. 1, 1992).
Akiko Harasaki et al., “Improved vertical-scanning interferometry”,Applied Optics, vol. 39, No. 13, pp. 2107-2115 (May 1, 2000).

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