Method of applying the analysis of scrub mark morphology and...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S758010, C382S151000

Reexamination Certificate

active

07102368

ABSTRACT:
By examining scrub mark properties (such as position and size) directly, the performance of a wafer probing process may be evaluated. Scrub mark images are captured, image data measured, and detailed information about the process is extracted through analysis. The information may then be used to troubleshoot, improve, and monitor the probing process.

REFERENCES:
patent: 5657394 (1997-08-01), Schwartz et al.

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