Image sensor with guard rings and method for forming the same

Details Image sensor with guard rings and method for forming the same Image sensor with guard rings and method for forming the same

2006-03-14

2006-03-14

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

C250S208100, C257S432000

Reexamination Certificate

active

07012240

ABSTRACT:
An image sensor with air gaps as optical guard rings is provided. The air gaps are formed in a stacked insulating layer between the sensor areas, that is, around each pixel. A light transmitting insulating layer is formed on the stacked insulating layer without filling the air gaps.

REFERENCES:
patent: 5880018 (1999-03-01), Boeck et al.
patent: 6465861 (2002-10-01), Liu et al.
patent: 2002/0182631 (2002-12-01), Schurmann-Mader et al.
patent: 2004/0097065 (2004-05-01), Lur et al.
patent: 2004/0151014 (2004-08-01), Speakman
patent: 2004/0157165 (2004-08-01), Oh

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