Thin-film photoelectric conversion device and a method of...

Details Thin-film photoelectric conversion device and a method of... Thin-film photoelectric conversion device and a method of...

2006-07-11

2006-07-11

Diamond, Alan (Department: 1753)

Batteries: thermoelectric and photoelectric

Photoelectric

Cells

C136S261000, C257S049000, C257S075000, C438S058000, C438S097000, C438S152000, C438S153000, C438S151000, C438S150000, C438S149000, C438S142000, C438S147000, C438S476000, C438S486000

Reexamination Certificate

active

07075002

ABSTRACT:
A method of manufacturing a thin-film solar cell, comprising the steps of: forming an amorphous silicon film on a substrate; placing a metal element that accelerates the crystallization of silicon in contact with the surface of the amorphous silicon film; subjecting the amorphous silicon film to a heat treatment to obtain a crystalline silicon film; depositing a silicon film to which phosphorus has been added in contact with the crystalline silicon film; and subjecting the crystalline silicon film and the silicon film to which phosphorus has been added to a heat treatment to getter the metal element from the crystalline film.

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