Semiconductor pressure sensor

Details Semiconductor pressure sensor Semiconductor pressure sensor

2006-07-25

2006-07-25

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S753000

Reexamination Certificate

active

07080560

ABSTRACT:
The semiconductor pressure sensor includes a substrate (20). The sensor includes a diaphragm (26) implemented in the substrate (26) and being displaceable by a pressure medium acting on a side of the substrate (26). The sensor includes sensor circuitry (22, 23) implemented on the opposite side of the substrate in coincidence with the diaphragm (26) for detecting displacement of the diaphragm (26) for pressure.

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patent: 04-309831 (1992-02-01), None

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