Coating processes – Electrical product produced – Electron emissive or suppressive
Reexamination Certificate
2006-09-05
2006-09-05
Cleveland, Michael (Department: 1762)
Coating processes
Electrical product produced
Electron emissive or suppressive
C445S024000
Reexamination Certificate
active
07101586
ABSTRACT:
A system and method for fabricating a FED device is disclosed. The system and method provide for use of PECVD hydrogenation followed by nitrogen plasma treatment of the tip of the current emitter of the FED device. The use of this process greatly reduces the native oxides in the tip of the current emitter. Such native oxides function as undesirable insulators degrading current emission. By reducing the amount of oxides in the tip, this invention provides for an increase in the current emission of the FED device.
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