Vacuum pump system for light gases

Pumps – Diverse pumps – Including rotary nonexpansible chamber type

Reexamination Certificate

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C417S205000, C417S423400

Reexamination Certificate

active

07033142

ABSTRACT:
A vacuum pump system includes at least one high-vacuum pump, a fore-vacuum pump, and at least one intermediate pump, arranged between the at least one high-vacuum pump and the fore-vacuum pump and having its inlet connected directly and exclusively with the outlet of the high-vacuum pump.

REFERENCES:
patent: 3536418 (1970-10-01), Breaux
patent: 4235572 (1980-11-01), Winkler et al.
patent: 4850806 (1989-07-01), Morgan et al.
patent: 4887941 (1989-12-01), Crinquette et al.
patent: 4919599 (1990-04-01), Reich et al.
patent: 5733104 (1998-03-01), Conrad et al.
patent: 6030181 (2000-02-01), Conrad
patent: 6435811 (2002-08-01), Beyer et al.

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