Piezoelectric/electrostrictive film device

Details Piezoelectric/electrostrictive film device Piezoelectric/electrostrictive film device

2006-03-28

2006-03-28

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S330000, C310S332000, C310S328000

Reexamination Certificate

active

07019438

ABSTRACT:
A piezoelectric/electrostrictive film device is provided, including a ceramic substrate, and a piezoelectric/electrostrictive actuator including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode that are sequentially layered on the substrate. The piezoelectric/electrostrictive layer covers an upper surface of the lower electrode and a lower surface of the upper electrode and protrudes over edges thereof. The protruded portions of the piezoelectric/electrostrictive layer are coupled to the substrate via a coupling member.

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