Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-03-07
2006-03-07
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S390000, C219S405000, C392S416000, C392S418000
Reexamination Certificate
active
07009148
ABSTRACT:
A method of processing a substrate, comprising forming a chemically amplified resist film on a substrate, irradiating energy beams to the chemically amplified resist film to form a latent image therein, carrying out heat treatment with respect to the chemically amplified resist film, heating treatment being carried out in a manner of relatively moving a heating section for heating the chemically amplified resist film and the substrate forming a gas stream flowing reverse to the relatively moving direction of the heating section between the lower surface of the heating section and the chemically amplified resist film.
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Kawano, K. et al., “Apparatus For Processing Substrate and Method of Processing The Same”, U.S. Appl. No. 10/026,419, filed Dec. 26, 2001.
Kihara, N. et al., “Effect of Acid Evaporation in Chemically Amplified Resists on Insoluble Layer Formation”, Journal of Photopolymer Science and Technology, vol. 8, No. 4, pp. 561-569, (1995).
Ito Shin'ichi
Kawano Kenji
Shiobara Eishi
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Fuqua Shawntina
Kabushiki Kaisha Toshiba
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