Optical switch and optical switch array

Details Optical switch and optical switch array Optical switch and optical switch array

2006-01-31

2006-01-31

Lee, John D. (Department: 2874)

Optical waveguides

With optical coupler

Switch

C385S022000

Reexamination Certificate

active

06993218

ABSTRACT:
An optical switch according to this invention has a planar waveguide in which an optical path is formed. A trench is formed in the upper surface of this planar waveguide. A cantilevered movable member is mounted on the planar waveguide. A comb is formed in the end portion of this movable member. A mirror which intercepts light propagating on the optical path is fixed to the end of the movable member. An electrode opposing the movable member is formed on the planar waveguide. A comb is formed in that portion of this electrode, which opposes the comb of the movable member. The movable member and electrode are connected via a voltage source. When this voltage source generates electrostatic force between the movable member and electrode, the movable member bends, and the mirror moves along the bottom surface of the trench accordingly.

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Cornel Marxer et al., “Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications”, Journal of Microelectromechanical Systems, vol. 6, No. 3, Sep. 1997, pp. 277-279.
Hogari, Kazuo., et al. “Electrostatically driven micromechanical 2×2 optical switch.” Applied Optics , Optical Society of America, vol. 30, No. 10, Apr. 1, 1991, XP000202072, pp. 1253-1257, Applied Optics.

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