Test method and test apparatus for semiconductor device

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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06992499

ABSTRACT:
A method for testing a semiconductor device, is disclosed, which comprises detecting a defect in a semiconductor wafer having a plurality of chips on each of which a plurality of semiconductor elements are formed, to detect those of the chips which have a defect, and carrying out a fist electrical characteristics test to a first chip without defect, and a second electrical characteristics test which is more detailed than the first electrical characteristics test to a second chip having the defect.

REFERENCES:
patent: 5793650 (1998-08-01), Mirza
patent: 6259267 (2001-07-01), Fujiwara
patent: 6553323 (2003-04-01), Obara et al.
patent: 6657453 (2003-12-01), Frankowsky
patent: 10-313026 (1998-11-01), None
patent: 2001-318151 (2001-11-01), None
patent: 2002-26102 (2002-01-01), None
patent: WO 98/33213 (1998-07-01), None

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