Method of manufacturing a current-perpendicular-to-plane...

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S603120, C029S603130, C029S603140, C029S603150, C029S603160, C029S603180, C360S313000, C360S324200, C216S022000, C216S040000, C216S041000

Reexamination Certificate

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07043823

ABSTRACT:
A current-perpendicular-to the-plane (CPP) magnetoresistive device, such as a magnetic tunnel junction (MTJ), is formed by patterning a capping layer (e.g., using resist) in the shape of a central region of an underlying free ferromagnetic layer that in turn resides over additional layers of the MTJ. Side regions of the capping layer are removed by ion milling or etching down into the free ferromagnetic layer. Unmasked side regions of the ferromagnetic layer are then oxidized to render them locally non-ferromagnetic and electrically insulating.

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A. Tanaka et al., “Spin-Valve Heads in the Current-Perpendicular-to-Plane Mode for Ultrahigh-Density Recording”, IEEE Transactions on Magnetics, vol. 38, No. 1, Jan. 2002, pp. 84-88.

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