Fluid bearings and vacuum chucks and methods for producing same

Metal working – Method of mechanical manufacture – Process for making bearing or component thereof

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C384S012000

Reexamination Certificate

active

06990737

ABSTRACT:
Fluid bearings, vacuum chucks and methods for producing these devices. One example of a method for forming a fluid bearing includes forming a plate having a face surface and a bonding surface, coupling a first side of a body to the bonding surface, placing the face surface of the plate against a predetermined surface, and generating a pressure difference to conform the face surface to the predetermined surface. One example of a fluid bearing of the invention includes a plate support and a flexible bearing plate having a bonding surface which is attached to the plate support with an adhesive which is flexible before hardening. The flexible bearing plate conforms to a predetermined surface during a portion of the time that the adhesive hardens. Examples of vacuum chucks, and methods for forming vacuum chucks, and other aspects of the invention are described.

REFERENCES:
patent: 3022614 (1962-02-01), Dreyfus et al.
patent: 3134336 (1964-05-01), Huffman et al.
patent: 3322598 (1967-05-01), Marks et al.
patent: 3430318 (1969-03-01), Greenberg et al.
patent: 3833230 (1974-09-01), Noll
patent: 3984039 (1976-10-01), Hawley et al.
patent: 4422893 (1983-12-01), Duchateau et al.
patent: 4717263 (1988-01-01), Phillips
patent: 4856766 (1989-08-01), Huberts
patent: 4978233 (1990-12-01), Stotzel et al.
patent: 5407280 (1995-04-01), Heinzl et al.
patent: 5488771 (1996-02-01), Devitt et al.
patent: 5572598 (1996-11-01), Whil et al.
patent: 6012845 (2000-01-01), Lyon
patent: 1180597 (1970-02-01), None
patent: 55-115973 (1980-09-01), None
patent: 59-013119 (1984-01-01), None
patent: 05-044716 (1993-02-01), None
patent: 09-329129 (1997-12-01), None
IBM Technical Disclosure. “Air Bearing Construction”, vol. 16, Issue 12, May 1, 1974.
IBM Technical Disclosure. “Air Bearing Construction” vol. 16, Issue 12, May 1, 1974.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Fluid bearings and vacuum chucks and methods for producing same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fluid bearings and vacuum chucks and methods for producing same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fluid bearings and vacuum chucks and methods for producing same will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3530075

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.