Metal working – Method of mechanical manufacture – Process for making bearing or component thereof
Reexamination Certificate
2006-01-31
2006-01-31
Compton, Eric (Department: 3726)
Metal working
Method of mechanical manufacture
Process for making bearing or component thereof
C384S012000
Reexamination Certificate
active
06990737
ABSTRACT:
Fluid bearings, vacuum chucks and methods for producing these devices. One example of a method for forming a fluid bearing includes forming a plate having a face surface and a bonding surface, coupling a first side of a body to the bonding surface, placing the face surface of the plate against a predetermined surface, and generating a pressure difference to conform the face surface to the predetermined surface. One example of a fluid bearing of the invention includes a plate support and a flexible bearing plate having a bonding surface which is attached to the plate support with an adhesive which is flexible before hardening. The flexible bearing plate conforms to a predetermined surface during a portion of the time that the adhesive hardens. Examples of vacuum chucks, and methods for forming vacuum chucks, and other aspects of the invention are described.
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IBM Technical Disclosure. “Air Bearing Construction” vol. 16, Issue 12, May 1, 1974.
Blakely , Sokoloff, Taylor & Zafman LLP
Compton Eric
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