Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate
2006-04-18
2006-04-18
Wells, Nikita (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With target means
C250S311000
Reexamination Certificate
active
07030389
ABSTRACT:
An electron beam apparatus having an electron analyzer is achieved which can control the illumination lens system by feedback without adversely affecting the imaging action even if a specimen is positioned within the magnetic field of the objective lens. The apparatus has an energy shift control module for controlling energy shift. On receiving instructions about setting of energy shift from the CPU, the control module issues an instruction for shifting the accelerating voltage to a specified value to an accelerating-voltage control module. The control module also sends information about the energy shift to an energy shift feedback control module, which calculates the feedback value and supplies information about corrections of lenses and deflection coils to a TEM optics control module. The feedback value is multiplied by a corrective coefficient that can be calibrated.
REFERENCES:
patent: 4851768 (1989-07-01), Yoshizawa et al.
patent: 5300775 (1994-04-01), Van der Mast
patent: 5578823 (1996-11-01), Taniguchi
patent: 5798524 (1998-08-01), Kundmann et al.
patent: 11-086771 (1999-03-01), None
patent: 2000-268766 (2000-02-01), None
Fernandez Kalimah
JEOL Ltd.
The Webb Law Firm
Wells Nikita
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