Method of manufacturing an emitter

Details Method of manufacturing an emitter Method of manufacturing an emitter

2006-05-23

2006-05-23

Le, Dung A. (Department: 2818)

Semiconductor device manufacturing: process

Electron emitter manufacture

C438S022000, C257S010000, C257S163000, C365S118000, C365S217000

Reexamination Certificate

active

07049158

ABSTRACT:
A method is disclosed for creating an emitter having a flat cathode emission surface: First a protective layer that is conductive is formed on the flat cathode emission surface. Then an electronic lens structure is created over the protective layer. Finally, the protective layer is etched to expose the flat cathode emission surface.

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