System and apparatus for testing a micromachined optical device

Details System and apparatus for testing a micromachined optical device System and apparatus for testing a micromachined optical device

2006-01-17

2006-01-17

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S445000

Reexamination Certificate

active

06987561

ABSTRACT:
A system and apparatus for testing a micromachined optical device includes a computerized test station that generates signals to control the micromachined optical device as well as various test equipment and analyzes signals generated by the micromachined optical device and various test equipment. The computerized test station typically provides for both manual and automated testing of the micromachined optical device. In order to test the micromachined optical device, various optical measurement devices are typically mounted on a frame. The frame is configured so as to maintain proper alignment between the optical measurement devices and the micromachined device under test. The frame is mounted to or integral with a focusing device. The frame moves along with focusing movements of the focusing device in such a way that the optical measurement devices are properly aligned with the micromachined device under test when the focusing device is focused on the micromachined device under test.

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patent: 6052197 (2000-04-01), Drake
Honer, et al., A High-Resolution Laser-Based Deflection Measurement System for Characterizing Aluminum Electrostatic Actuators.

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