Liquid metal ion source

Details Liquid metal ion source Liquid metal ion source

1992-03-20

1993-03-16

Berman, Jack I.

Radiant energy

Ion generation

Field ionization type

250423F, 31511181, H01J 2700

Patent

active

051947390

ABSTRACT:
A liquid metal ion source which can produce cesium ions stably for a long time in the form of a beam focussed to a micro-spot. The liquid metal ion source is composed of a reservoir containing a liquid metal, and a needle type emitter passing through the reservoir and having a sharp tip end which protrudes from the reservoir, the liquid metal being composed primarily of a cesium compound containing 0.3-20 atom % of oxygen.

REFERENCES:
patent: 4687938 (1987-08-01), Tamura et al.
patent: 4994711 (1991-02-01), Matossian

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