Semiconductor laser element produced by aligning a photomask...

Details Semiconductor laser element produced by aligning a photomask... Semiconductor laser element produced by aligning a photomask...

2006-03-21

2006-03-21

Huff, Mark F. (Department: 1756)

Coherent light generators

Particular active media

Semiconductor

C372S043010, C372S087000, C372S098000, C430S005000, C430S022000, C430S319000, C430S321000

Reexamination Certificate

active

07016387

ABSTRACT:
A semiconductor laser element that has window regions at its opposite end faces and an electrode portion superposed on an inner portion of the upper surface thereof to include covering an inner portion of the upper surfaces of the window regions without covering the entire upper surfaces of the window regions, by aligning a photomask for forming electrode pattern segments at a predetermined position over a laser substrate, which includes a plurality of element regions in a matrix pattern and a plurality of window region pattern stripes corresponding to the window regions of the element regions, the electrode pattern segments being used for forming electrodes at predetermined positions between the adjacent window region pattern stripes, wherein the photomask includes: an electrode pattern region for forming the electrode pattern segments; and an auxiliary mask having a scale section for measuring the amount of alignment deviation of the electrode pattern segments with respect to the window region pattern.

REFERENCES:
patent: 4337443 (1982-06-01), Umeda et al.
patent: 5228047 (1993-07-01), Matsumoto et al.
patent: 5593815 (1997-01-01), Ahn
patent: 5799028 (1998-08-01), Geels et al.
patent: 5802091 (1998-09-01), Chakrabarti et al.
patent: 5815522 (1998-09-01), Nagai
patent: 06-275485 (1994-09-01), None
patent: 10-070064 (1998-03-01), None

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