Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Reexamination Certificate
2006-05-09
2006-05-09
Allen, Stephone B. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controlled circuit
C250S216000, C250S214100, C257S432000, C257S225000, C385S012000, C385S014000, C385S129000, C385S130000, C385S131000
Reexamination Certificate
active
07041956
ABSTRACT:
A solid-state image pickup device100is constructed in which a waveguide15is formed in an insulating layer on a light-receiving sensor portion2,a side wall161of the waveguide15is covered with a reflective film17made of an Al film deposited by a CVD method, an underlayer film19is formed between the reflective film17and the side wall161of the waveguide15and the underlayer film19is made of a VIb-group element. It is possible to obtain a solid-state image pickup device including a waveguide in which hydrogen supplied to the light-receiving sensor portion2can be restrained from being absorbed by the underlayer film19and which has the reflective film17of high reflectivity with satisfactory surface condition, satisfactory coverage and excellent adhesion.
REFERENCES:
patent: 5844290 (1998-12-01), Furumiya
patent: 6246081 (2001-06-01), Abe
patent: 6255640 (2001-07-01), Endo et al.
patent: 6259083 (2001-07-01), Kimura
Abe Hideshi
Enomoto Yoshiyuki
Takahashi Shingo
Allen Stephone B.
Monbleau Davienne
Sonnenschein Nath & Rosenthal LLP
Sony Corporation
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