Method for spectral analysis, and scanning microscope

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation

Reexamination Certificate

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C356S308000, C356S326000, C250S458100

Reexamination Certificate

active

06977724

ABSTRACT:
A method for spectral analysis of the light proceeding from a specimen using a multi-band detector comprises the steps of defining an overall spectral region; from the overall spectral region, defining a first spectral subregion and defining at least a second spectral subregion; simultaneously detecting the light proceeding from the specimen in the first and the second spectral subregion, and generating detection values; displacing the first spectral subregion and displacing the second spectral subregion within the overall spectral region; and repeating steps c) and d) until the light has been detected over the entire overall spectral region.

REFERENCES:
patent: 3460892 (1969-08-01), Dolin
patent: 5751417 (1998-05-01), Uhl
patent: 2001/0046046 (2001-11-01), Schoeppe
patent: 2002/0021440 (2002-02-01), Knebel
patent: 4330347 (1995-03-01), None
patent: 19510102 (1996-02-01), None
patent: 19906757 (1999-02-01), None
patent: 19842288 (2000-02-01), None
patent: 10038049 (2002-02-01), None
patent: 0031577 (2000-06-01), None

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