Dynamic magnetic information storage or retrieval – Head – Core
Reexamination Certificate
2005-08-09
2005-08-09
Tupper, Robert S. (Department: 2652)
Dynamic magnetic information storage or retrieval
Head
Core
C360S123090
Reexamination Certificate
active
06927940
ABSTRACT:
The electroplated components of a magnetic head of the present invention are fabricated utilizing a seed layer that is susceptible to reactive ion etch removal techniques. A preferred seed layer is comprised of tungsten or titanium. Following the electroplating of the components utilizing a fluorine species reactive ion etch process the seed layer is removed, and significantly, the fluorine RIE process creates a gaseous tungsten or titanium fluoride compound removal product. The problem of seed layer redeposition along the sides of the electroplated components is overcome because the gaseous fluoride compound is not redeposited. The present invention also includes an enhanced two part seed layer, where the lower part is tungsten, titanium or tantalum and the upper part is composed of the material that constitutes the component to be electroplated.
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Hsiao Richard
Robertson Neil Leslie
Webb Patrick Rush
Guillot Robert O.
Intellectual Property Law Offices
International Business Machines - Corporation
Tupper Robert S.
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