Measuring and testing – With fluid pressure – Dimension – shape – or size
Reexamination Certificate
2005-12-27
2005-12-27
Williams, Hezron (Department: 2856)
Measuring and testing
With fluid pressure
Dimension, shape, or size
Reexamination Certificate
active
06978658
ABSTRACT:
A retractable proximity sensor system with a self-compensating mechanism to reduce the impact of mechanical instability on the precision of a proximity sensor is disclosed. The retractable proximity sensor system includes a retractable proximity sensor and a proximity sensor housing in which the housing includes a reference plate that is either integral or affixed to the housing. The proximity sensor precisely detects very small distances between a measurement probe and a work surface, such as, for example, a semiconductor wafer. A method is provided for extending and retracting a proximity sensor and compensating for the drift associated with the mechanical instability of a proximity sensor head to improve precision.
REFERENCES:
patent: 2986924 (1961-06-01), Becker
patent: 3026714 (1962-03-01), Evans et al.
patent: 3433408 (1969-03-01), Bellman et al.
patent: 3482433 (1969-12-01), Gladwyn
patent: 3792609 (1974-02-01), Blair et al.
patent: 3904960 (1975-09-01), Niehaus
patent: 4041584 (1977-08-01), Williamson
patent: 4142401 (1979-03-01), Wilson
patent: 4173143 (1979-11-01), Venton-Walters
patent: 4179919 (1979-12-01), McKechnie
patent: 4187715 (1980-02-01), Nevitt
patent: 4550592 (1985-11-01), Dechape
patent: 4579005 (1986-04-01), Brown
patent: 4583917 (1986-04-01), Shah
patent: 4607960 (1986-08-01), Wulff
patent: 4655089 (1987-04-01), Kappelt et al.
patent: 4953388 (1990-09-01), Barada
patent: 4971517 (1990-11-01), Perkey et al.
patent: 5184503 (1993-02-01), Hancock
patent: 5317898 (1994-06-01), Nemeth
patent: 5341100 (1994-08-01), Taylor
patent: 5429001 (1995-07-01), Kleven
patent: 5503035 (1996-04-01), Itoh et al.
patent: 5540082 (1996-07-01), Okuyama et al.
patent: 6152162 (2000-11-01), Balazy et al.
patent: 6237404 (2001-05-01), Crary et al.
patent: 6244121 (2001-06-01), Hunter
patent: 6831452 (2004-12-01), McTigue
patent: 1 399 397 (1982-11-01), None
patent: 57-191507 (1975-07-01), None
Burrows, V.R., “The Principles and Application of Pneumatic Guaging,” FWP Journal, Oct. 1976, pp 31-42.
Derwent Abstract Accession No. 86-324714/49, SU 1225634 A (KIEV AUTOM INST) Apr. 23, 1986.
Pending U.S. Appl. No. 10/322,768, High Resolution Gas Gauge Proximity Sensor, filed Dec. 19, 2002 by Gajdeczko et al.
Pending U.S. Appl. No. 10/683,271, Liquid Flow Proximity Sensor for Use in Immersion Lithography, filed Oct. 14, 2003 by Violette, Kevin.
Pending U.S. Appl. No. 10/646,720, High Resolution Gas Gauge Proximity Sensor, filed Aug. 25, 2003 by Joesph Lyons.
Pending U.S. Appl. No. 10/894,028, Fluid Gauge Proximity Sensor and Method of Operating Same Using a Modulated Fluid Flow, filed Jul. 20, 2004 by Galburt et al.
Pending U.S. Appl. No. 10/854,429, Gas Gauge Proximity Sensor with a Modulated Gas Flow, filed May 27, 2004 by Ebert et al.
Pending U.S. Appl. No. 10/833,249, High Resolution Gas Gauge Proximity Sensor, filed Apr. 28, 2004 by Carter et al.
Proximity Sensor Nozzle Shroud with Flow Curtain, filed Dec. 7, 2004 by Herman Vogel.
ASML Holding N.V.
Fitzgerald John
Sterne Kessler Goldstein & Fox P.L.L.C.
LandOfFree
Proximity sensor with self compensation for mechanism... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Proximity sensor with self compensation for mechanism..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Proximity sensor with self compensation for mechanism... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3520376