Piezoelectric filter and electronic component including the...

Details Piezoelectric filter and electronic component including the... Piezoelectric filter and electronic component including the...

2005-06-07

2005-06-07

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S365000

Reexamination Certificate

active

06903496

ABSTRACT:
A piezoelectric filter includes a piezoelectric thin film disposed on a silicon substrate, and a plurality of piezoelectric resonators each having electrodes facing each other with the piezoelectric thin film sandwiched therebetween, and each of the plurality of piezoelectric resonators has a filtering function. The electrode material of one of the piezoelectric resonators is different from the electrode material of the other piezoelectric resonators. For example, the former electrode material has a higher stiffness than the latter electrode material. The piezoelectric filter achieves high-Q resonance and improves the attenuation characteristic.

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