Method of transforming polymer film into carbon film in...

Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly

Reexamination Certificate

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C445S051000, C445S005000, C438S020000

Reexamination Certificate

active

06910936

ABSTRACT:
In manufacturing surface conduction electron-emitting devices, a polymer thin film is arranged to connect a pair of electrodes and then transformed into a low resistivity film (carbon film) by irradiating the polymer film with an energy beam. The energy beam irradiation is scanned over the polymer films plural times so that heat due to the energy beam irradiation does not affect other members which constitute the device and also the processing time for carbonization of polymer film is reduced.

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Baba et al., “Field Emission from an Ion-Beam-Modified Polyimide Film,” Jpn. J. Appl. Phys., V. 38, pp. L 261-L263 (1999).

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