Ring laser scatterometer

Details Ring laser scatterometer Ring laser scatterometer

2005-06-28

2005-06-28

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

C372S094000

Reexamination Certificate

active

06912053

ABSTRACT:
A scatterometer utilizes the dead zone resulting from lockup caused by scatter from a sample located in the optical path of a ring laser at a location where counter-rotating pulses cross. The frequency of one pulse relative to the other is varied across the lockup dead zone.

REFERENCES:
patent: 5251230 (1993-10-01), Lai et al.
patent: 5331403 (1994-07-01), Rosker et al.
patent: 5363192 (1994-11-01), Diels et al.
patent: 5367528 (1994-11-01), Diels et al.
patent: 6441907 (2002-08-01), Son et al.
patent: 6650682 (2003-11-01), Diels et al.
patent: 2003/0189711 (2003-10-01), Orr et al.
“Ultrashort Laser Pulse Phenomena”; Diels, et al, ppgs. 497-501.

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