Method of forming pattern

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element

Reexamination Certificate

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Reexamination Certificate

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06929967

ABSTRACT:
A method of forming a pattern suitable for fabricating a liquid crystal device which includes the steps of forming a film on a substrate, printing a resist pattern by having the film covered with a screen mask, etching the film using the resist pattern as a mask, and stripping the resist pattern.

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