Semiconductor dynamic quantity sensor with movable electrode...

Details Semiconductor dynamic quantity sensor with movable electrode... Semiconductor dynamic quantity sensor with movable electrode...

2005-12-13

2005-12-13

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

06973829

ABSTRACT:
A semiconductor dynamic quantity sensor has a support substrate with a rectangular opening portion, and a movable electrode and fixed electrodes are respectively supported by the support substrate through supporting portions to face the opening portion. The supporting portions supporting the movable electrode are arranged in a direction approximately the same as that in which the supporting portions supporting the fixed electrodes are arranged.

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U.S. Appl. No. 09/306,381, filed May 6, 1999, Muto et al.

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