Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-11-29
2005-11-29
Bahta, Kidest (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S121000, C700S021000, C716S030000, C438S014000
Reexamination Certificate
active
06970757
ABSTRACT:
A method for controlling a manufacturing process includes processing a plurality of workpieces in a tool; monitoring a rework rate associated with the workpieces processed in the tool; and initiating an automatic corrective action in response to the rework rate being greater than a predetermined threshold. A manufacturing system includes a tool adapted to process a plurality of workpieces and a rework controller adapted to monitor a rework rate associated with the workpieces processed in the tool and initiate an automatic corrective action in response to the rework rate being greater than a predetermined threshold.
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patent: 6408219 (2002-06-01), Lamey et al.
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Bode Christopher A.
Hewett Joyce S. Oey
Miller Michael L.
Pasadyn Alexander J.
Peterson Anastasia Oshelski
Advanced Micro Devices , Inc.
Bahta Kidest
Williams Morgan & Amerson
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